Gas Mass flow controller, Thermal Gas flow meter, Flow meter KOFLOC MFC 3660

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Quick Details
Place of Origin:
Gyeonggi-do, South Korea
Brand Name:
Model Number:
MFC 3660
gas flow rate controller:
up to 20l/min
Supply Ability
Supply Ability:
1 Unit/Units per Week
Packaging & Delivery
Packaging Details
Packed in Paper box with air cap
Incheon, South Korea
Lead Time :
1~2 weeks
Product Description

 Mass Flow Controller 3660


 (1) Features

 • Equipped with an advanced flow sensor of constant-current temperature difference detection type to ensure high-speed response

 • Use of a normally closed valve to ensure safety

 • High reliability ensured using a solenoid actuator

 • Low differential pressure type control available for combustible gases (LP option)






Flow range

(N2 equivalent, 20°C/1 atm)


10 SCCM–20 SLM

(freely selectable)


30 SLM–100 SLM

(freely selectable)


Thermal mass flow sensor

Valve type

Proportional solenoid valve (closed when not energized)

Control range

2–100% (F.S.)

5–100% (F.S.)


2 sec. or less

(0–100% within ±2% typical)

3 sec. or less

(0–100% within ±2% typical)


±1.0% F.S. (25°C)

±1.5% F.S. (25°C)

Temperature coefficient

t ±0.1 F.S./°C (15–35°C)

±0.2 F.S./°C (15–35°C)



Operating differential


F.S. ≤ 5 SLM: 50–300 kPa (G)

F.S. ≤ 50 SLM: 150–300 kPa (G)

F.S. > 100 SLM: 50–300 kPa (G)

F.S. > 50 SLM: 200–300 kPa (G)

Option: Medium differential pressure (MP) and low differential

pressure (LP) specifications are available.


operating pressure

500 kPa (G) or less

Proof pressure

980 kPa (G)

Leak rate

1 × 10-8 Pa·m3 /s or less (excluding permeation of He)


ambient temperature


Allowable ambient humidity

10–90% (No condensation allowed)

Materials of parts

in contact with gases

Body: SUS316

Valve seat: FKM (option: CR or NBR)

Sealing: FKM (option: CR or NBR)

Electric connection

Dsub 9-pin connector as per KFC Standard

(Compliant with SEMI Standard)

Flow rate input signals

0–5 VDC (Input impedance: 1 MΩ or more)

Flow rate output signals

0–5 VDC (External load resistance: 250 kΩ or more)

Required power supply

+15 VDC (±5%) 100 mA, −15 VDC (±5%) 250 mA

Joint (Main unit bore)

Standard: 1/4SWL

Option: 1/8SWL 1/4VCR RC1/4, etc.

Standard: 3/8SWL Option: 1/2SWL 3/8VCR RC3/8, etc.


Approx. 1000 g

Approx. 1500 g





Packaging & Shipping

 Packed in Paper box with air cap






Company Information

  SEHWA HIGH TECH CO., LTD. was established in 1995 as a manufacturer and developer of gas mixing,metering and analysing of gases for every type of packaging machine that is used in the food industry. With these products SEHWA has become the leading manufacturer of gas blending systems for MAP in KOREA. Our systems are suited to specific types of products and techniques used by customers and require only a small installation effort. In addition, as a total MAP/CAP consultant we recommend most suitable gas composition for your products, and packaging machine as well as flim, tray. Sehwa High Tech pr om is e s  to be com e  a com pany that is  hone s t and contributes to social development at all times, and May the blessing and grace of God be upon all people who visited us.